A 1-MHz 2-D CMUT array for HIFU thermal ablation

We developed a fully-populated 2-D capacitive micromachined ultrasonic transducer (CMUT) array for high intensity focused ultrasound (HIFU) treatment. The 2-D CMUT array, which consists of 20 × 20 square CMUT elements with an element-to-element pitch of 1 mm, was designed and fabricated using the thick-buried-oxide (BOX) fabrication process. It was then assembled on a custom interface board that can provide various array configurations depending on the desired applications. In this study, the interface board groups the CMUT array elements into eight channels, based on the phase delay from the element to the targeted focal point at a 20-mm distance from the array surface, which corresponds to an F-number of 1. An 8-channel phase generating system supplies continuous waves with eight different phases to the eight channels of the CMUT array through bias-tees and amplifiers. This array aperture, grouped into eight channels, gives a focusing gain of 6.09 according to field simulation using Field II. Assuming a peak-to-peak pressure of 1 MPa at the surface of the array, our custom temperature simulator predicts successful tissue ablation at the focus. During the measurements, each channel was tuned with a series inductor for an operational frequency of 1 MHz. With a CMUT DC bias of 100 V and a 1-MHz AC input voltage of 55 V, we achieved peak-to-peak output pressures of 173.9 kPa and 568.7 kPa at the array surface and at the focus, respectively. The focusing gain calculated from this measurement is 3.27, which is lower than the simulated gain of 6.09 because of the mutual radiation impedance among the CMUT cells. Further optimization of the operating condition of this array and design improvements for reducing the effect of mutual radiation impedance are currently on-going.